This paper describes the use of Optical Emission Spectroscopy (OES) to measure electron densities and temperatures in non-equilibrium plasmas. The ways to interpret relative line-intensities of neutral argon atoms are evaluated based upon a collisional-radiative model including atomic collisional processes. A conversion from an excitation temperature determined from relative line intensities assuming a Boltzmann population distribution to the thermal electron temperature in the electron temperature range 1–4 eV and electron density range 10¹⁰–10¹² cm^–3 is given. Procedures to obtain electron temperature T_e and density N_e of non-equilibrium argon plasma by OES measurement with collisional radiative model.

本文介绍了使用光发射光谱（OES）来测量非平衡等离子体中的电子密度和温度。基于包括原子碰撞过程的碰撞辐射模型，评估了解释中性氩原子相对线强度的方法。给出了从假设玻尔兹曼总体分布的相对线强度确定的激发温度到电子温度范围为1–4 eV和电子密度范围为10 ¹⁰ –10 ¹² cm ^–3的热电子温度的转换。获得电子温度T _e和密度N _e的程序 碰撞辐射模型的OES测量非平衡氩等离子体