In this paper, 10 resonant modes were divided based on the structure of a specific two-dimensional electromagnetic micromirror from Professor Shen’s team and Finite Element Method (FEM), and using as many as 10 resonant modes to do such analysis was the first time according to the best of our knowledge. The results showed that the slow axis can participate in several resonant motions under the signals of resonant frequencies. In particular, participating in Mode 1 for slow-scan axis was the key reason to the instability of Vertical Refreshing Scanning (VRS) in raster scanning. In addition, a piecewise PID control based on filters design for this electromagnetic micromirror was proposed to suppress the unexpected resonant oscillation and to improve the angular positioning accuracy in slow-scan axis control. Finally, the proposed method was applied to electromagnetic micromirror stages, and the experimental results showed that the proposed approach was reliable.

中文翻译：

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特定电磁微镜的分析与控制

本文根据沉教授团队的特定二维电磁微镜的结构和有限元方法（FEM）划分了10种共振模式，并且首次使用多达10种共振模式进行分析。据我们所知。结果表明，在共振频率信号的作用下，慢轴可以参与多种共振运动。尤其是，参与模式1的慢速扫描轴是光栅扫描中垂直刷新扫描（VRS）不稳定的主要原因。另外，提出了一种基于滤波器设计的分段PID控制的电磁微镜，以抑制意外的共振，并提高慢扫描轴控制中的角度定位精度。最后，