This paper deals with different mechanisms of the interaction of light and heavy low-energy ions with nanoporous structures and main structural changes that occur in these structures under irradiation. The study was carried out using the molecular dynamics method for silicon models with pores of radius of 8 and 28 Å, which are structural analogs of porous films with low dielectric constant (low-k materials). Based on the results obtained, the mechanisms of interaction of light and heavy noble gas ions (He, Ne, Ar, and Xe) with these structures were compared, and the effects of ion mass and energy on processes of pore sealing were studied.

中文翻译：

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用轻质和重质低能离子辐照纳米多孔结构：增强溅射和气孔密封

本文探讨了轻质低能离子与重质低能离子与纳米孔结构相互作用的不同机理，以及在辐射下这些结构中发生的主要结构变化。使用分子动力学方法对半径为8和28的孔的硅模型进行了研究，这是具有低介电常数的多孔膜（低k材料）的结构类似物。根据获得的结果，比较了轻，重惰性气体离子（He，Ne，Ar和Xe）与这些结构的相互作用机理，并研究了离子质量和能量对孔密封过程的影响。