Imaging and small-spot (small area) XPS have become increasingly important components of surface chemical analysis during the last three decades, and its use is growing. Some ambiguity in the use of terminology, understanding of concepts, and lack of appropriate reference materials leads to confusing and not always reproducible data. In this paper, it is shown that by using existing knowledge, appropriate test specimens, and standardized approaches, problems of comparability and such reproducibility issues recently observed for XPS data reported in the scientific literature can be overcome. The standardized methods of ISO 18516:2019, (i) the straight-edge, (ii) the narrow-line, and (iii) the grating method, can be used to characterize and compare the lateral resolution achieved by imaging XPS instruments and are described by reporting examples. The respective measurements are made using new test specimens. When running an XPS instrument in the small-spot (small area) mode for a quantitative analysis of a feature of interest, the question arises as to what contribution to the intensity originates from outside the analysis area. A valid measurement approach to control the intensity from outside the nominal analysis area is also described. As always, the relevant resolution depends on the specific question that needs to be addressed. The strengths and limitations of methods defining resolution are indicated.

中文翻译：

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XPS中的横向分辨率和分析区域测量简介

在过去的三十年中，成像和小面积（小面积）XPS成为表面化学分析的越来越重要的组成部分，并且它的使用正在增长。术语使用上的歧义，对概念的理解以及缺乏适当的参考资料会导致数据混乱，且并非始终可重复。本文表明，通过使用现有知识，适当的测试样本和标准化方法，可以克服科学文献中最近针对XPS数据观察到的可比性和此类可再现性问题。ISO 18516：2019的标准化方法（i）直边，（ii）细线和（iii）光栅法可用于表征和比较通过XPS仪器成像获得的横向分辨率，并且通过举报示例进行说明。使用新的试样进行相应的测量。当在小光斑（小面积）模式下运行XPS仪器以对感兴趣的特征进行定量分析时，就会出现以下问题：对强度的贡献来自分析区域之外。还描述了一种有效的测量方法，可从标称分析区域之外控制强度。与往常一样，相关的解决方案取决于需要解决的特定问题。指出了定义分辨率的方法的优缺点。还描述了一种有效的测量方法，可从标称分析区域之外控制强度。与往常一样，相关的解决方案取决于需要解决的特定问题。指出了定义分辨率的方法的优缺点。还描述了一种有效的测量方法，可从标称分析区域之外控制强度。与往常一样，相关的解决方案取决于需要解决的特定问题。指出了定义分辨率的方法的优缺点。