A highly sensitive fiber Bragg grating (FBG) based square diaphragm pressure sensor has been designed and verified both in theory and experiment. The square diaphragm deflects due to the pressure difference generated at both sides of the square, and causes the compression along the axis of the pre-stretched FBG. The experimental results indicate that the pressure sensitivity of the proposed sensor reaches 3.402 pm/kPa in the range of 0–200 kPa with a higher coefficient of determination of 0.9985. Meanwhile, the sensor is found to present low hysteresis, good repeatability and resolution. Relative error recorded at 3.13 % represents that the effect of the temperature compensation is remarkable. Furthermore, the designed pressure sensor is simple, cost-effective and suitable for low pressure measurement.

设计并基于理论和实验对基于高灵敏度光纤布拉格光栅（FBG）的方形膜片压力传感器进行了设计和验证。方形隔膜由于在方形两侧产生的压力差而发生挠曲，并导致沿预拉伸FBG轴的压缩。实验结果表明，该传感器的压力灵敏度在0-200 kPa范围内达到3.402 pm / kPa，具有更高的测定系数0.9985。同时，发现该传感器具有低滞后性，良好的重复性和分辨率。记录的相对误差为3.13％，表明温度补偿的效果显着。此外，设计的压力传感器简单，经济高效，适用于低压测量。