当前位置: X-MOL 学术Opt. Rev. › 论文详情
Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)
Reducing edge error based on further analyzing the stability of edge TIF and correcting the post-edge algorithm in MRF process
Optical Review ( IF 1.1 ) Pub Date : 2019-12-16 , DOI: 10.1007/s10043-019-00555-x
Xianyun Zhong , Bin Fan , Fan Wu

A precise and efficient edge-controlled method is of importance to ensure the final performance of the optical system. The authors put forward a novel method to reduce the edge effect in the magnetorheological finishing (MRF) process through further analyzing the stability of the MRF edge tool influence function (TIF) and correcting the post-edge algorithm of dwell time. To demonstrate the feasibility and advantage of this edge-controlled theory, two mirror substrates are taken as the experimental samples. The Φ 200 mm, R-200 mm concave sphere mirror (fused silica) is removed about 3 μm uniformly and the experimental results indicate that the edge error region can be effectively suppressed below 1.5 mm. Another Φ 610 mm, R-2100, K-1 lightweighting parabolic mirror is verified about the actual practicability. The residual error reaches RMS 6.5 nm from original RMS 182 nm after two run iterations; meanwhile, the edge effect is well controlled to a large extent. The simulations of edge error coincide well with the corresponding experimental results, which strongly verify the feasibility of the edge-suppressing theory presented in this paper.

中文翻译:

在进一步分析边缘TIF的稳定性并校正MRF过程中的后边缘算法的基础上减少边缘误差

精确而有效的边缘控制方法对于确保光学系统的最终性能至关重要。通过进一步分析MRF边缘工具影响函数(TIF)的稳定性并校正停留时间的后边缘算法,作者提出了一种减少磁流变精加工(MRF)过程中的边缘效应的新方法。为了证明这种边缘控制理论的可行性和优势,将两个镜面基板作为实验样品。将Φ200 mm,R -200 mm凹球面镜(熔融石英)均匀去除约3μm,实验结果表明,可以将边缘误差区域有效地抑制在1.5 mm以下。另一个Φ610毫米,R-2100,已验证K-1轻量化抛物面镜的实际实用性。经过两次运行迭代,残留误差从原始RMS 182 nm达到RMS 6.5 nm。同时,边缘效应得到了很好的控制。边缘误差的仿真与相应的实验结果非常吻合,这充分证明了本文提出的边缘抑制理论的可行性。
更新日期:2019-12-16
down
wechat
bug