Abstract

The surface region of the CdS/por-Si/p-Si heterostructure in which the porous layer was formed by metal-assisted etching of the single-crystal p-Si substrate is studied by scanning electron microscopy and Raman spectroscopy methods. Experimental results of the CdS film morphology study are processed using two-dimensional detrended fluctuation analysis and average mutual information methods. It is shown that the porous layer has a significant effect on structural features of the CdS film.

中文翻译：

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金属辅助化学刻蚀形成多孔硅膜的CdS / por-Si / p-Si异质结构表面区域的结构特征

摘要

通过扫描电子显微镜和拉曼光谱法研究了CdS / por-Si / p-Si异质结构的表面区域，其中通过金属辅助蚀刻单晶p-Si衬底形成了多孔层。使用二维去趋势波动分析和平均互信息方法处理CdS膜形态研究的实验结果。已经表明，多孔层对CdS膜的结构特征具有显着影响。