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Scanning Microwave Impedance Microscopy: Room-Temperature and Low-Temperature Applications for Device and Material Characterization
IEEE Microwave Magazine ( IF 3.7 ) Pub Date : 2020-10-01 , DOI: 10.1109/mmm.2020.3008304
Ravi Chandra Chintala , Kurt Rubin , Yongliang Yang

For more than 50 years, Moore's law has creatively captured how the capability of electronics has expanded by creating ever smaller devices and exploiting new materials and devices. Critical to maintaining that trajectory of increased capability of electronics has been the creation of new and ever-more sensitive measurement techniques to guide invention and fabrication. Quantum effects, which are already important in roomtemperature semiconductor devices small in size, are key to the creation of this future technology. Further, many quantum effects arise at very low temperatures or with 1D and 2D materials and devices. This is motivating new metrology techniques at very low temperature, which assist in exploring these new phenomena for understanding and commercialization.

中文翻译:

扫描微波阻抗显微镜:用于器件和材料表征的室温和低温应用

50 多年来,摩尔定律创造性地捕捉到了电子产品是如何通过创造更小的设备和开发新材料和设备来扩展的。保持电子产品能力不断提高的轨迹的关键是创造新的、更加灵敏的测量技术来指导发明和制造。量子效应在室温下的小尺寸半导体器件中已经很重要,它是创造这种未来技术的关键。此外,许多量子效应在极低的温度下或一维和二维材料和设备中出现。这正在推动极低温下的新计量技术,这有助于探索这些新现象以进行理解和商业化。
更新日期:2020-10-01
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