Abstract An optical infinite-target generator is a key component utilized in the point-spread function (PSF) measurement of an optical camera. The traditional optical infinite-target generator uses a collimator that adopts an optical focal plane of single-aperture light lead-in. The measurement accuracy is relatively low and only a viewpoint PSF is obtained at a measurement. Moreover, the traditional optical infinite-target generator is difficult to be integrated into cameras. Here, we propose and experimentally demonstrate a MEMS light infinite-target micro-generator (MEMS-LITMG) with an updateable multi-aperture light lead-in, which can be used as the light infinite multiple-target generator for measuring PSF of cameras. The MEMS-LITITG, a dynamically updateable multi-aperture light lead-in device, can measure different viewpoints’ PSF by spatially modulating multi-aperture light lead-in. The random error of this measurement system is decreased by the optimized reconstruction with multiple apertures structure. Based on this new construction and implementation method in the design of the new infinite-target generator system, the reliability for high-accuracy PSF measurement of an optical camera is guaranteed.

中文翻译：

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用于相机点扩散函数测量的 MEMS 光无限目标微型发生器

摘要 光学无限目标发生器是光学相机点扩散函数（PSF）测量中的关键部件。传统的光学无限目标发生器使用的准直器采用单孔径光导入的光学焦平面。测量精度较低，测量时仅获得视点PSF。此外，传统的光学无限目标发生器很难集成到相机中。在这里，我们提出并实验证明了一种具有可更新多孔径光导入的 MEMS 光无限目标微发生器（MEMS-LITMG），可用作测量相机 PSF 的光无限多目标发生器。MEMS-LITITG，一种动态可更新的多孔径光引入装置，可以通过空间调制多孔径光导入来测量不同视点的 PSF。该测量系统的随机误差通过多孔径结构的优化重构来降低。基于这种新的无限目标发生器系统设计的构建和实现方法，保证了光学相机高精度PSF测量的可靠性。