Diffusion and bonding behavior of the doped carbon by variation of thermal energy was investigated in terms of carbon depth profile and local atomic structure. The thermal energy of pulsed laser was limited to the range of 20%~50% to dope the carbon and prevent degradation of the coating layer with laser carburization. The doped carbon was confirmed to be distributed to a depth of around 20 nm from the surface at 20% thermal energy by ToF‐SIMS analysis. Carbon diffused at about 400 nm with 50% thermal energy, and most of the carbon spread from the surface to around 80 nm. The EXAFS analysis represented that the peak of the interstitial carbon site was formed at 20% and the ZrN peak shifted toward the ZrC peak by increasing the thermal energy. The analysis of the electronic structure and the bonding state demonstrated that the proportion of substitutional carbon was about 21% at a thermal energy of 50%. The internal stress was calculated using HR‐XRD with a 5‐axes sample stage, which was −453 MPa before doping and then increased to −1494 MPa at 50% because the mixture of interstitial and substitutional carbon increased distortion inside the coating layer. The elastic modulus and hardness were 459 and 37.9 GPa at 50%, respectively, which were improved by 10% and 20% compared to those of the TiZrN coating.

中文翻译：

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掺碳的TiZrN涂层的热能变化引起的碳深度分布和内部应力

通过碳深度分布和局部原子结构研究了掺杂碳通过热能的扩散和键合行为。将脉冲激光的热能限制在20％〜50％的范围内，以掺杂碳并防止激光渗碳使涂层降解。通过ToF-SIMS分析，确认了掺杂的碳在20％的热能下距表面约20 nm的深度分布。碳以50％的热能在约400 nm处扩散，大部分碳从表面扩散到约80 nm。EXAFS分析表明，间隙碳位点的峰形成在20％处，并且ZrN峰通过增加热能而向ZrC峰移动。电子结构和键合状态的分析表明，在50％的热能下，取代碳的比例约为21％。内部应力是使用HR-XRD和5轴样品台计算得出的，掺杂前为-453 MPa，然后在50％时增加至-1494 MPa，因为间隙碳和替代碳的混合物增加了涂层内部的变形。50％时的弹性模量和硬度分别为459和37.9 GPa，与TiZrN涂层相比，分别提高了10％和20％。掺杂前为-453 MPa，然后在50％时增加至-1494 MPa，因为间隙碳和替代碳的混合物增加了涂层内部的形变。50％时的弹性模量和硬度分别为459和37.9 GPa，与TiZrN涂层相比，分别提高了10％和20％。掺杂前为-453 MPa，然后在50％时增加至-1494 MPa，因为间隙碳和替代碳的混合物增加了涂层内部的形变。50％时的弹性模量和硬度分别为459和37.9 GPa，与TiZrN涂层相比，分别提高了10％和20％。