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Hybrid capacitive/piezoelectric visualized meteorological sensor based on in-situ polarized PVDF-TrFE films on TFT arrays
Sensors and Actuators A: Physical ( IF 4.1 ) Pub Date : 2020-09-05 , DOI: 10.1016/j.sna.2020.112286
Qian Zhang , Shuai Liu , Hongqiang Luo , Zhen Guo , Xiaoran Hu , Yong Xiang

A novel type of hybrid capacitive/piezoelectric sensor was designed and fabricated for real-time monitoring of the size, rate, and frequency of rainfall. The design is based on in situ polarized poly (vinylidene fluoride–trifluoroethylene) (PVDF-TrFE) films on thin-film transistor (TFT) arrays. The polarization of the PVDF-TrFE film with an area of 200 × 200 mm2 can be achieved within 5 min using an in-situ polarization process, and the piezoelectric coefficient d33 can reach an average value of 27 pC/N with a uniform distribution across the area. The PVDF-TrFE piezoelectric sensor exhibits high sensitivity, with a raindrop frequency error margin of 1%. The capacitive sensor is composed of the PVDF-TrFE films and TFT arrays, which can be used to determine the size and shape of raindrops on the sensor surface. In addition, the sensor can also be used for high-precision detection of water level, with a resolution of 50 μm.



中文翻译:

基于TFT阵列上原位极化PVDF-TrFE薄膜的电容/压电混合可视化气象传感器

设计并制造了一种新型的混合电容/压电传感器,用于实时监测降雨的大小,速率和频率。该设计基于薄膜晶体管(TFT)阵列上的原位极化聚偏二氟乙烯-三氟乙烯(PVDF-TrFE)薄膜。使用原位极化工艺,可以在5分钟内实现面积为200×200 mm 2的PVDF-TrFE薄膜的极化,压电系数d 33可以达到27 pC / N的平均值,并且在整个区域内分布均匀。PVDF-TrFE压电传感器具有很高的灵敏度,雨滴频率​​误差幅度为1%。电容式传感器由PVDF-TrFE薄膜和TFT阵列组成,可用于确定传感器表面雨滴的大小和形状。此外,该传感器还可以用于水位的高精度检测,分辨率为50μm。

更新日期:2020-09-10
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