The development of micro-fabrication and micro-assembly technology is indispensable for the future manufacturing of miniaturized, functional, and integrated devices. This paper proposes a planar micro-assembly technology to make the assembly of micro-objects easier. Firstly, delicate three-dimensional (3D) structures were fabricated on glass and silicon slice substrates using femtosecond laser two-photon polymerization (2PP). Secondly, transparent fluorescent scintillation ceramic powder, referred to as fluorescent powder, was assembled using a laboratory-made 3D moving heating micro-operator into a microstructure on a glass substrate, and this device is used to assemble the graphene powder into the microstructure on the silicon slice substrate. The fluorescence spectra and Raman spectra characterizations of the fluorescent powder and graphene powder in the microstructure were carried out by using excitation light at 405 nm and 532 nm, respectively. According to the above results, it can be concluded that the powder properties of the fluorescent powder and graphene powder assembled into the microstructure were not changed. The experimental device could not only assemble many micron-sized powder materials into hollow microstructures of arbitrary shape but also joined microstructures with different materials and characteristics to form a complex hybrid microstructure system.

微制造和微组装技术的发展对于未来的小型化，功能化和集成化设备的制造必不可少。本文提出了一种平面微装配技术，以使微型对象的装配更加容易。首先，使用飞秒激光双光子聚合（2PP）在玻璃和硅片基板上制造精细的三维（3D）结构。其次，使用实验室制造的3D移动加热微操作器将透明的荧光闪烁陶瓷粉末（称为荧光粉）组装到玻璃基板上的微结构中，然后使用此设备将石墨烯粉末组装到玻璃基板上的微结构中。硅片基板。荧光粉和石墨烯粉在微观结构中的荧光光谱和拉曼光谱表征分别通过使用405 nm和532 nm的激发光进行。根据以上结果，可以得出结论，组装到微结构中的荧光粉和石墨烯粉的粉末性质没有改变。该实验装置不仅可以将许多微米级的粉末材料组装成任意形状的空心微结构，而且可以将具有不同材料和特性的微结构连接起来，形成一个复杂的混合微结构系统。可以得出结论，组装到微结构中的荧光粉和石墨烯粉的粉末性质没有改变。该实验装置不仅可以将许多微米级的粉末材料组装成任意形状的空心微结构，而且可以将具有不同材料和特性的微结构连接起来，形成一个复杂的混合微结构系统。可以得出结论，组装到微结构中的荧光粉和石墨烯粉的粉末性质没有改变。该实验装置不仅可以将许多微米级的粉末材料组装成任意形状的空心微结构，而且可以将具有不同材料和特性的微结构连接起来，形成一个复杂的混合微结构系统。