Niobium thin films are used at CERN (European Organization for Nuclear Research) for coatings of superconducting radio-frequency (SRF) accelerating cavities. Numerical simulations can help to better understand the physical processes involved in such coatings and provide predictions of thin film properties. In this article, particle-in-cell Monte Carlo 3D plasma simulations are validated against experimental data in a coaxial cylindrical system allowing both DC diode and DC magnetron operation. A proper choice of ion induced secondary electron emission parameters enables to match experimental and simulated discharge currents and voltages, with argon as the process gas and niobium as the target element. Langmuir probe measurements are presented to further support simulation results. The choice of argon gas with a niobium target is driven by CERN applications, but the methodology described in this paper is applicable to other discharge gases and target elements.Validation of plasma...

中文翻译：

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离子诱导的二次电子发射参数在PICMC等离子体模拟中的影响以及直流圆柱二极管和磁控管放电的实验验证

铌薄膜在CERN（欧洲核研究组织）中用于超导射频（SRF）加速腔的涂层。数值模拟可以帮助更好地理解此类涂层涉及的物理过程，并提供薄膜特性的预测。在本文中，在允许DC二极管和DC磁控管工作的同轴圆柱系统中，针对实验数据验证了单元粒子Monte Carlo 3D等离子体模拟。的离子感应的二次电子发射参数适当选择能够匹配实验和模拟放电电流和电压，用氩气作为工艺气体和铌作为目标元件。提出了Langmuir探针测量以进一步支持仿真结果。