Tailored voltage waveform, composed of a fundamental frequency and the second harmonic, is applied to a capacitively coupled chlorine discharge operated in the pressure range 1–50 Pa. The electronegativity is very high and the electron power absorption is mainly due to drift-ambipolar (DA) electron power absorption within the electronegative core. For operating pressures of 1 and 10 Pa the creation of a dc self-bias and asymmetric response is demonstrated and applied to control the ion bombardment energy while the ion flux on the electrodes remains fixed. However, the available range in mean ion energy is rather limited and the range is significantly narrower than typically observed for electropositive discharges. For operating pressure of 50 Pa it is not possible to control the ion bombardment energy by the phase angle between the fundamental frequency and the second harmonic. At the low pressure of 1 Pa the power absorption by ##IMG## {${\mathrm{C}\mathrm{l}}_{...}

中文翻译：

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量身定制的电压波形应用于电容耦合氯气放电

将由基频和二次谐波组成的定制电压波形应用于在1-50 Pa压力范围内工作的电容耦合氯放电。电负性非常高，并且电子功率吸收主要是由于双极性漂移（ DA）负电性核心内的电子功率吸收。对于1和10 Pa的工作压力，演示了直流自偏压和不对称响应的创建，并将其应用于控制离子轰击能量，同时电极上的离子通量保持固定。但是，平均离子能量的可用范围相当有限，并且该范围比正电放电通常观察到的范围要窄得多。对于50 Pa的工作压力，不可能通过基频和二次谐波之间的相角来控制离子轰击能量。在1 Pa的低压下，## IMG ## {$ {\ mathrm {C} \ mathrm {l}} _ {...}的功率吸收