In this work, we present the results of simulations carried out for N2-H2 capacitively coupled radio-frequency discharges, running at low pressure (0.3–0.9 mbar), low power (5–20 W), and for amounts of H2 up to 5%. Simulations are performed using a hybrid code that couples a two-dimensional time-dependent fluid module, describing the dynamics of the charged particles in the discharge, to a zero-dimensional kinetic module, that solves the Boltzmann equation and describes the production and destruction of neutral species. The model accounts for the production of several vibrationally and electronic excited states, and contains a detailed surface chemistry that includes recombination processes and the production of NHx molecules. The results obtained highlight the relevance of the interactions between plasma and surface, given the role of the secondary electron emission in the electrical parameters of the discharge and the critical importance of the surface production of ammonia to the neutral and ionic chemistry of the discharge.

中文翻译：

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N ₂ -H ₂电容耦合射频在低压下放电。第二部分。建模结果：等离子体表面相互作用的相关性。

在这项工作中，我们展示了对 N2-H2 电容耦合射频放电、在低压 (0.3-0.9 mbar)、低功率 (5-20 W) 和 H2 量高达5%。使用混合代码执行模拟，该代码将描述放电中带电粒子动力学的二维时间相关流体模块与求解玻尔兹曼方程并描述带电粒子的产生和破坏的零维动力学模块相结合。中性物种。该模型解释了几种振动和电子激发态的产生，并包含详细的表面化学，包括重组过程和 NHx 分子的产生。获得的结果突出了等离子体和表面之间相互作用的相关性，