We developed a newly designed system based on in situ monitoring with Fourier transform infrared (FT-IR) spectroscopy and quadrupole mass spectrometry (QMS) for understanding decomposition mechanism and by-products of vaporized Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe₂)₃) during the move to process chamber at various temperatures because thermal decomposition products of unwanted precursors can affect process reliability. The FT-IR data show that the –CH₃ peak intensity decreases while the –CH₂– and C=N peak intensities increase as the temperature is increased from 100 to 250 °C. This result is attributed to decomposition of the dimethylamido ligands. Based on the FT-IR data, it can also be assumed that a new decomposition product is formation at 250 °C. While in situ QMS analysis demonstrates that vaporized CpZr(NMe₂)₃ decomposes to N-ethylmethanimine rather than methylmethyleneimine. The in situ monitoring with FT-IR spectroscopy and QMS provides useful information for understanding the behavior and decomposes of CpZr(NMe₂)₃ in the gas phase, which was not proven before. The study to understand the decomposition of vaporized precursor is the first attempt and can be provided as useful information for improving the reliability of a high- advanced ultra-thin film deposition process using atomic layer deposition in the future.

我们开发了基于傅里叶变换红外（FT-IR）光谱和四极质谱（QMS）进行原位监测的新设计系统，以了解汽化的环戊二烯基三（二甲基氨基）锆（CpZr（NMe ₂））的分解机理和副产物。₃）在各种温度下移至处理室的过程中，因为不需要的前体的热分解产物会影响处理的可靠性。FT-IR数据显示–CH ₃峰强度降低，而–CH ₂–和C = N峰强度随温度从100升高到250°C而增加。该结果归因于二甲基酰胺基配体的分解。根据FT-IR数据，还可以假定在250°C时形成了新的分解产物。虽然原位QMS分析表明汽化的CpZr（NMe ₂）₃分解为N-乙基甲亚胺而不是甲基亚甲基亚胺。利用FT-IR光谱和QMS进行原位监测可为了解CpZr（NMe ₂）₃的行为和分解提供有用的信息。在气相中，这是以前没有证明过的。理解汽化前驱体分解的研究是首次尝试，可作为将来提高使用原子层沉积的高级超薄膜沉积工艺的可靠性的有用信息。