Abstract Ag nanoparticles/Mo–Ag alloy films with different Ag contents were prepared on polyimide by magnetron sputtering. The effects of Ag contents on the microstructure of self-grown Ag nanoparticles/Mo–Ag alloy films were investigated using XRD, FESEM, EDS and TEM. The Ag content plays an important role in the size and number of uniformly distributed Ag nanoparticles spontaneously formed on the Mo–Ag alloy film surface, and the morphology of the self-grown Ag nanoparticles has changed significantly. Additionally, it is worth noting that the Ag nanoparticles/Mo–Ag alloy films covered by a thin Ag film exhibits highly sensitive surface-enhanced Raman scattering (SERS) performance. The electric field distributions were calculated using finite-difference time-domain analysis to further prove that the SERS enhancement of the films is mainly determined by “hot spots” in the interparticle gap between Ag nanoparticles. The detection limit of the Ag film/Ag nanoparticles/Mo–Ag alloy film for Rhodamine 6G probe molecules was 5 × 10−14 mol/L. Therefore, the novel type of the Ag film/Ag nanoparticles/Mo–Ag alloy film can be used as an ideal SERS-active substrate for low-cost and large-scale production.

中文翻译：

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Ag含量对自生长Ag纳米颗粒/Mo-Ag合金薄膜微观结构和SERS性能的影响

摘要 采用磁控溅射在聚酰亚胺上制备了不同Ag含量的Ag纳米颗粒/Mo-Ag合金薄膜。使用XRD、FESEM、EDS和TEM研究了Ag含量对自生长Ag纳米颗粒/Mo-Ag合金薄膜微观结构的影响。Ag含量对Mo-Ag合金薄膜表面自发形成的均匀分布的Ag纳米颗粒的尺寸和数量起着重要作用，自生长的Ag纳米颗粒的形貌发生了显着变化。此外，值得注意的是，被薄银膜覆盖的银纳米粒子/钼银合金膜表现出高度敏感的表面增强拉曼散射（SERS）性能。使用有限差分时域分析计算电场分布，以进一步证明薄膜的 SERS 增强主要由 Ag 纳米粒子之间的粒子间隙中的“热点”决定。Ag膜/Ag纳米颗粒/Mo-Ag合金膜对罗丹明6G探针分子的检测限为5×10-14 mol/L。因此，新型的银膜/银纳米粒子/钼银合金膜可作为一种理想的SERS活性基底，用于低成本和大规模生产。