ABSTRACT

The present investigation deals with the columnar structured growth of Mn doped ZnO (MZO) thin films by radio frequency sputtering technique. The X-ray diffraction and the processed electron diffraction pattern confirmed the hexagonal wurtzite structure and the film growth direction along (101) plane. The structure of grown film was compared with the pristine ZnO film and the JCPDS card No. 00-36-1451. The microstructures of the pristine ZnO and MZO films were studied by scanning electron microscopy and atomic force microscopy. The columnar structure growth of MZO was confirmed by transmission electron microscopy using TEM cross-section sample. The presence of constituent elements and their concentrations in the films were recorded by energy dispersive X-ray diffraction spectroscopy. The optical transmittance, absorption edge and band gap of the material were studied by UV-Visible transmission spectroscopy. The field dependent magnetization at room-temperature was analysed by using vibrating sample magnetometer and magneto-optic Kerr effect.

摘要

本研究涉及通过射频溅射技术生长 Mn 掺杂 ZnO (MZO) 薄膜的柱状结构。X射线衍射和处理后的电子衍射图证实了六方纤锌矿结构和沿（101）面的薄膜生长方向。将生长膜的结构与原始 ZnO 膜和 JCPDS 卡 No. 00-36-1451 进行了比较。通过扫描电子显微镜和原子力显微镜研究了原始 ZnO 和 MZO 薄膜的微观结构。MZO的柱状结构生长通过使用TEM横截面样品的透射电子显微镜证实。通过能量色散X射线衍射光谱记录薄膜中组成元素的存在及其浓度。光透过率，通过紫外-可见透射光谱研究了材料的吸收边和带隙。通过使用振动样品磁力计和磁光克尔效应分析室温下的场依赖性磁化。