Gastrointestinal (GI) cancers are among some of most significant public health issues worldwide. Early cancer diagnosis will increase GI cancer patients’ survival rate, however, developing endoscopes for early cancer detection is a challenge as it is difficult to design a high-resolution optical scanner. In this paper, we report a new 3D optical scanner using piezoelectric (for in-plane, X-Y axes) and pneumatic (for out-of-plane, Z-axis) mechanisms. Feedback control is implemented to reduce disturbances and provide a stable position for the pneumatic actuator. The scanner shows a Z and X-Y resolution of 1.5 $\mu$m and 1.4 $\mu$m, respectively. The field-of-view (FOV) is around 100 × 100 (μm)², with a frame rate of 1.25 fps (frame per second). Paper fiber, and onion epidermis images were obtained by the new optical scanner.

胃肠道（GI）癌症是全世界最重要的公共卫生问题之一。早期癌症诊断将提高胃肠道癌症患者的存活率，但是，开发内窥镜以进行早期癌症检测是一项挑战，因为很难设计高分辨率的光学扫描仪。在本文中，我们报告了一种新的3D光学扫描仪，该扫描仪使用压电（用于平面内，XY轴）和气动（用于平面外，Z轴）机制。实施反馈控制以减少干扰并为气动执行器提供稳定的位置。扫描仪的Z和XY分辨率为1.5 $\mu$m和1.4 $\mu$米，分别。视场（FOV）约为100×100（μm）²，帧速率为1.25 fps（每秒帧）。通过新的光学扫描仪获得了纸纤维和洋葱表皮图像。