Abstract

The possibility of replication of high-frequency diffraction gratings obtained in a photoresist layer to glass substrates using polymer compositions (OKM and Technovit) is shown and their comparative analysis is carried out. The replication mechanism of the relief-phase structure is based on a two-stage process, which consists in obtaining a nickel master element, followed by applying a polymer composition to it and curing it under the influence of UV radiation. The replicating regimes were optimized (time, exposure, thickness of the polymer base), which made it possible to obtain relief phase diffraction gratings with a depth of surface relief comparable with the initial structure obtained in the photoresist layer. The diffraction efficiency of the resulting gratings was estimated, as well as the change in the depth of the surface relief of polymer copies obtained from one master element.

中文翻译：

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各种聚合物组合物为增强现实系统创建凸相衍射光栅的实验研究

摘要

显示了使用聚合物组合物（OKM和Technovit）将在光致抗蚀剂层中获得的高频衍射光栅复制到玻璃基板的可能性，并进行了对比分析。浮雕相结构的复制机理基于两步法，该过程包括获得镍母体元素，然后在其上施加聚合物组合物并在紫外线辐射的影响下使其固化。优化了复制方式（时间，曝光，聚合物基体的厚度），这使得可以获得具有与在光致抗蚀剂层中获得的初始结构相当的表面浮雕深度的浮雕相衍射光栅。估计所得光栅的衍射效率，