This work presents an electromechanical, semi-analytic model for the description of the bending and electrostatic actuation of a stress-deformed micro-cantilever with large deflection angle. In our approach, we discretized the stress-deformed cantilever into multiple sub-beam segments and calculated the external moment in each node. Unlike most other models, the external moment that attacks the cantilever has not been linearized, which renders our approach valid for cantilevers with large initial tilt and strong bending. By calculation of the stationary solutions of the differential equation describing the bending dynamics, it was possible to calculate the voltage-dependent bending of the cantilever. The model was applied and validated for different examples reported in the literature. A comparison of our calculations with the theoretical and experimental results in other publications proved our approach to be a time-saving method that is superior to existing analytic approaches...

中文翻译：

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半解析模型，用于计算静电悬臂的大角度弯曲

这项工作提出了一种机电半解析模型，用于描述具有大偏转角的应力变形微悬臂梁的弯曲和静电致动。在我们的方法中，我们将应力变形的悬臂离散化为多个子梁段，并计算了每个节点的外部矩。与大多数其他模型不同，攻击悬臂的外部力矩尚未线性化，这使我们的方法适用于初始倾斜大且弯曲强烈的悬臂。通过计算描述弯曲动力学的微分方程的固定解，可以计算悬臂梁的电压相关弯曲。应用该模型并针对文献中报道的不同示例进行了验证。