Abstract. Scattering of light from a surface depends on its microroughness. In general, total integrated scattering of a surface is expressed in terms of root-mean-square microroughness (σrms) using empirical relations. These empirical relations assume that the σrms is measured over the spatial scales ranging from 0 to surface length/diameter (L). In reality, σrms will be measured over finite spatial lengths/scales that result in band-limited microroughness (σbl) and hence band-limited integrated scatter (BLIS). BLIS depends on the microroughness of surface over the finite spatial bandwidths rather than infinite spatial scales. Scatter from super polished optical mirrors peaks in specular direction and falls off exponentially. Hence, BLIS measurements in near-specular direction provide crucial information in understanding the relation between surface microroughness and scatter. Our work gives a detailed description of BLIS measurements carried out on super polished optical surfaces with different surface microroughness and a comparison between the scatter and surface microroughness measurements.

中文翻译：

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超抛光光学镜的带限积分散射测量

摘要。光从表面散射取决于其微观粗糙度。通常，表面的总积分散射使用经验关系以均方根显微粗糙度 (σrms) 表示。这些经验关系假设 σrms 是在从 0 到表面长度/直径 (L) 的空间尺度上测量的。实际上，将在有限空间长度/尺度上测量 σrms，从而导致带限微粗糙度 (σbl) 和带限积分散射 (BLIS)。BLIS 取决于有限空间带宽而非无限空间尺度上的表面微观粗糙度。来自超级抛光光学镜的散射在镜面反射方向达到峰值并呈指数下降。因此，近镜面反射方向的 BLIS 测量为理解表面微粗糙度和散射之间的关系提供了重要信息。我们的工作详细描述了在具有不同表面微粗糙度的超抛光光学表面上进行的 BLIS 测量，以及散射和表面微粗糙度测量之间的比较。