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Ferrite-free closed-loop inductively-coupled low mercury pressure UV lamp
Plasma Research Express Pub Date : 2020-06-30 , DOI: 10.1088/2516-1067/ab9fee
Oleg A Popov , Pavel V Starshinov , Rimma A Ilikeeva , Igor V Irkhin

Characteristics of ultraviolet (UV) radiation (254 nm) sources employing ferrite-free inductively-coupled low pressure mercury discharge excited in the closed-loop quartz tube with the inner diameter (ID), d t = 16,6 mm and the length, Λ pl = 815 mm were experimentally studied. Discharge was maintained at a frequency of 1,7 MHz and RF powers, P lamp = 95–170 W, in the mixture of mercury vapor (~7–8 mTorr) and buffer gas fill (Ar, 30%Ne + 70%Ar) at pressures of 0,7 and 1,0 Torr. A 3-turn induction coil made from low loss Litz wire (resistivity, ρ w = 1,4 × 10 –4 Ω cm −1 , wire diameter, d w = 1,5 mm) was disposed on the lamp surface along the closed-loop tube perimeter. As lamp RF power increased from 95 to 170 W, induction coil power losses, P coil , decreased from 7–9 to 3–4 W while coil power efficiency, η coil = 1- ( P coil / P ...

中文翻译:

无铁氧体闭环电感耦合低汞压紫外灯

采用无铁氧体感应耦合低压汞放电的紫外(UV)辐射(254 nm)源的特性在闭环石英管中激发,其内径(ID)为dt = 16,6 mm,长度为Λ对pl = 815 mm进行了实验研究。在汞蒸气(〜7–8 mTorr)和缓冲气体填充物(Ar,30%Ne + 70%Ar)的混合物中,放电频率保持为1.7 MHz,RF功率为P lamp = 95–170 W )在0.7和1.0托的压力下。由低损耗Litz线制成的3匝感应线圈(电阻率ρw = 1,4×10 –4Ωcm -1,线径,dw = 1,5 mm)沿封闭的灯管布置在灯的表面,环管周长。当灯管的射频功率从95 W增加到170 W时,感应线圈的功率损耗P线圈从7–9降低到3-4 W,而线圈功率效率η线圈= 1-(P线圈/ P ...
更新日期:2020-08-31
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