Laser enhanced field evaporation of surface atoms in laser-assisted Atom Probe Tomography (APT) can simultaneously excite photoluminescence in semiconductor or insulating specimens. An atom probe equipped with appropriate focalization and collection optics has been coupled with an in situ micro-photoluminescence (μPL) bench that can be operated during APT analysis. The photonic atom probe instrument we have developed operates at frequencies up to 500 kHz and is controlled by 150 fs laser pulses tunable in energy in a large spectral range (spanning from deep UV to near IR). Micro-PL spectroscopy is performed using a 320 mm focal length spectrometer equipped with a CCD camera for time-integrated and with a streak camera for time-resolved acquisitions. An example of application of this instrument on a multi-quantum well oxide heterostructure sample illustrates the potential of this new generation of tomographic atom probes.

中文翻译：

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光子原子探针耦合 3D 原子尺度分析与原位光致发光光谱

激光辅助原子探针断层扫描 (APT) 中表面原子的激光增强场蒸发可以同时激发半导体或绝缘样品中的光致发光。配备适当聚焦和收集光学器件的原子探针与可在 APT 分析期间操作的原位微光致发光 (μPL) 工作台相结合。我们开发的光子原子探针仪器的工作频率高达 500 kHz，由 150 fs 激光脉冲控制，可在大光谱范围（从深紫外到近红外）内调节能量。微 PL 光谱是使用配备有用于时间积分的 CCD 相机和用于时间分辨采集的条纹相机的 320 mm 焦距光谱仪进行的。