Abstract

ZrN coatings were formed by magnetron sputtering at various rates of nitrogen flow in the reaction chamber: 3, 4, 5, and 6 cm³/min. The thickness of the ZrN coatings was approximately 3 μm. Using atomic force microscopy (AFM), we studied the surface morphology; roughness; coefficient of friction С_fr; specific volumetric wear ω of ZrN coatings with the construction of С_fr dependencies on the number of scan cycles; and specific volumetric wear on load, probe speed, number of scan cycles. It was found that the coating obtained at a nitrogen flow rate of 3 cm³/min has the lowest values of С_fr and ω.

中文翻译：

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原子力显微镜在微接触条件下ZrN涂层的摩擦磨损

摘要

ZrN涂层是通过磁控管溅射在反应室中以3、4、5和6 cm ³ / min的不同氮气流量形成的。ZrN涂层的厚度为约3μm。使用原子力显微镜（AFM），我们研究了表面形态。粗糙度 摩擦系数的С _FR ; 的ZrN涂层与的结构的比体积磨损ω С _FR上扫描周期的数目的依赖性; 以及负载的特定体积磨损，测头速度，扫描周期数。结果发现，在3cm的氮气流速获得的涂层³ /分钟具有的最低值С _FR和ω。