The authors report quartz crystal microbalance (QCM) integrated with hexagonal boron nitride–graphene (hg) monolayer heterostructure as a sensor to detect mass flow of sulphur hexafluoride (SF 6 ), an important electrical insulating gas, under humid conditions. Their recent work demonstrated an enhancement in QCM sensing characteristics upon attaching monolayer 2D materials onto the QCM electrode surface and its application for improved relative humidity measurement. Here, they extend this approach to detect flow of SF 6 gas causing variation in relative humidity. They fabricated a hg-QCM sensor by transferring the heterostructure thin film onto the QCM electrode surface using a standard wet transfer technique and measured return loss of the QCM under SF 6 gas flow at a selected RH condition. The mass flow of the humid SF 6 gas effects perturbation in damping at the QCM surface as indicated by changes in the motional resistance of the QCM. The motional resistance changes introduced significant variation in loaded Q -factor, the magnitude of which was gas species-dependent, thus allowing to distinguish SF 6 from other common electronics gases.

中文翻译：

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用于在潮湿条件下感测 SF6 气体流量的二维材料附加石英晶体微量天平

作者报告了集成六方氮化硼-石墨烯 (hg) 单层异质结构的石英晶体微量天平 (QCM) 作为传感器，可在潮湿条件下检测六氟化硫 (SF 6 )（一种重要的电绝缘气体）的质量流量。他们最近的工作证明了将单层 2D 材料附着到 QCM 电极表面后 QCM 传感特性的增强及其在改进相对湿度测量中的应用。在这里，他们扩展了这种方法来检测导致相对湿度变化的 SF 6 气体流量。他们使用标准湿转移技术将异质结构薄膜转移到 QCM 电极表面，并在选定的 RH 条件下测量了 QCM 在 SF 6 气流下的回波损耗，从而制造了 hg-QCM 传感器。湿 SF 6 气体的质量流量影响 QCM 表面的阻尼扰动，如 QCM 运动阻力的变化所示。运动电阻变化导致负载 Q 因子发生显着变化，其大小取决于气体种类，从而可以将 SF 6 与其他常见的电子气体区分开来。