Quartz crystal microbalance (QCM) is a highly sensitive mass sensor and has been widely used in many fields. However, the nonuniform distribution of mass sensitivity will lead to poor reproducibility of QCM, which is not conducive to the application of QCM in some fields. Considering the effect of electrode shape, size, and material on mass sensitivity distribution, we found that for an AT-cut QCM with a fundamental frequency of 10 MHz, when the inner and outer diameters of silver ring electrode and the electrode loading factor are 2 and 5 mm and 0.0033, respectively, an approximately uniform mass sensitivity distribution can be obtained. The plating experiment in which rigid silver films were plated on the surface of electrode verified the uniformity. The uniform mass sensitivity distribution will make the application of QCM more convenient; the reproducibility can also be improved. This design of QCM will enrich QCM products and facilitate the application of QCM in various fields.

中文翻译：

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银电极QCM质量敏感度分布的均匀化

石英晶体微天平（QCM）是一种高灵敏度的质量传感器，已广泛应用于许多领域。然而，质量灵敏度的不均匀分布将导致QCM的重现性差，不利于QCM在某些领域的应用。考虑到电极形状，尺寸和材料对质量敏感性分布的影响，我们发现对于以10 MHz为基频的AT切割QCM，当银环电极的内径和外径以及电极负载系数为2时分别为5mm和0.0033，可以获得近似均匀的质量灵敏度分布。在电极表面镀硬银膜的镀覆实验证实了均匀性。质量灵敏度分布均匀，将使QCM的应用更加方便；重现性也可以提高。QCM的设计将丰富QCM产品并促进QCM在各个领域的应用。