Compact integrated thermal sensors are utilized to measure hot / cold spots in CPU cores in multiple locations and are important for the power/performance of the chip. Bipolar junction transistors (BJT) are the industry standard for temperature sensing elements because of their predictable physics. This paper reports on one of the smallest PNP BJT bandgap based thermal sensors to date. Miniaturization was achieved by using switched capacitor circuits with very small capacitors as opposed to the standard resistor-based bandgaps. Digitally controlled trims enable either a higher resolution or a nearly linear response to temperature. This ultra-miniature 0.003 mm 2 , PNP thermal- based sensor is fabricated in TSMC 65nm. It achieves a measured total ±3σ error of ±1.35°C with a resolution of 65mK and a 4.1ms conversion time. The sensor is optimized for dense CPU thermal mapping.

中文翻译：

---

用于密集 CPU 热监控的小型化 0.003 mm2 基于 PNP 的热传感器


紧凑型集成热传感器用于测量多个位置的 CPU 内核的热点/冷点，对于芯片的功耗/性能非常重要。双极结型晶体管 (BJT) 因其可预测的物理特性而成为温度传感元件的行业标准。本文报道了迄今为止最小的基于 PNP BJT 带隙的热传感器之一。小型化是通过使用具有非常小的电容器的开关电容器电路来实现的，而不是基于标准电阻器的带隙。数字控制微调可实现更高的分辨率或对温度的近线性响应。这款超小型 0.003 mm 2 、PNP 热传感器采用 TSMC 65nm 制造。它的测量总误差为 ±1.35°C，分辨率为 65mK，转换时间为 4.1ms。该传感器针对密集 CPU 热图进行了优化。