The data communications industry has begun transitioning from electrical to optical interconnects in datacenters in order to overcome performance bottlenecks and meet consumer needs. To mitigate the costs associated with this change and achieve performance for 5G and beyond, it is crucial to explore advanced photonic devices that can enable high-bandwidth interconnects via wavelength-division multiplexing (WDM) in photonic integrated circuits. Subwavelength grating (SWG) filters have shown great promise for WDM applications. However, the small feature sizes necessary to implement these structures have prohibited them from penetrating into industrial applications. To explore the manufacturability and performance of SWG filters in an industrial setting, we fabricate and characterize the first O-band subwavelength grating filters in a monolithic photonics technology at GLOBALFOUNDRIES (GF). We demonstrate a low drop channel loss of −1.2 dB with a flat-top response, a high extinction ratio of −30 dB, a 3 dB channel width of 5 nm and single-source thermal tunability without shape distortion. This filter structure was designed using elements from the product design kit provided by GF and functions in a compact footprint of 0.002 mm2 with a minimum feature size of 150 nm.

中文翻译：

---

单片光子技术中的 O 波段亚波长光栅滤波器

数据通信行业已经开始从数据中心的电互连过渡到光互连，以克服性能瓶颈并满足消费者的需求。为了降低与这种变化相关的成本并实现 5G 及更高版本的性能，探索先进的光子器件至关重要，这些器件可以通过光子集成电路中的波分复用 (WDM) 实现高带宽互连。亚波长光栅 (SWG) 滤波器在 WDM 应用中显示出巨大的前景。然而，实现这些结构所需的小特征尺寸阻止了它们渗透到工业应用中。为了在工业环境中探索 SWG 滤波器的可制造性和性能，我们在 GLOBALFOUNDRIES (GF) 的单片光子学技术中制造和表征了第一个 O 波段亚波长光栅滤波器。我们展示了 -1.2 dB 的低下降通道损耗、平顶响应、-30 dB 的高消光比、5 nm 的 3 dB 通道宽度和无形状失真的单源热可调性。这种滤波器结构是使用 GF 提供的产品设计套件中的元件设计的，并且在 0.002 mm2 的紧凑型占位面积中运行，最小特征尺寸为 150 nm。