In this research, vanadium pentoxide (V₂O₅) thin films were prepared on glass substrates by spray pyrolysis technique and the effect of nozzle to substrate distance (NSD) was investigated. The field emission Scanning electron microscope (FESEM) images and EDX analysis indicated the formation of nano-grains that improved their stoichiometry with increasing NSD. The XRD and Raman spectra showed that structural properties (orthorhombic/tetragonal phases) depend on NSD. The analysis of optical transmittance spectra revealed that with increasing NSD the direct band gap of the samples is increased from 2.27 to 2.60 eV due to improvement of chemical stoichiometry and crystalline phase change of the layers. Finally, sample with weak tetragonal phase was annealed in various atmospheres (N₂, air and O₂). We found the atmosphere of annealing process had profound effect on morphological, structural and optical properties of the as-grown sample.

在这项研究中，通过喷雾热解技术在玻璃基板上制备了五氧化二钒（V ₂ O ₅）薄膜，并研究了喷嘴到基板距离（NSD）的影响。场发射扫描电子显微镜（FESEM）图像和EDX分析表明，纳米颗粒的形成随着NSD的增加而提高了其化学计量。XRD和拉曼光谱表明结构性质（斜方晶/四方相）取决于NSD。光学透射光谱的分析显示，随着NSD的增加，样品的直接带隙从2.27 eV增加到2.60 eV，这归因于层化学化学计量和晶相变化的改善。最后，将四方相较弱的样品在各种气氛下退火（N₂，空气和O ₂）。我们发现退火过程的气氛对所生长的样品的形态，结构和光学性质有深远的影响。