This paper proposes a current source-type pulse generator circuit to improve load voltage waveforms by solving the voltage ringing problem of capacitively coupled plasma systems. The voltage source-type pulse power supplies used in the plasma industry have short-circuit currents and voltage ringing problems with capacitively coupled plasma loads. The current source-type pulse generator proposed in this paper can solve these problems. The proposed circuit consists of four detailed circuits: bias current generator, bias current modulator, slope current generator, and slope current modulator. They form two constant currents at the DC link, and output two pulse currents to the load. These output currents contribute to generating the plasma load voltage required by the capacitively coupled plasma process. The proposed circuit is verified by a PLECS simulator and a laboratory-scale hardware system. To check the improvement of the output waveform, a voltage source-type pulse generator and the current source-type pulse generator are tested under the same experimental conditions. The results are represented by load voltage and current waveforms. In addition, the entire system of the current source-type pulse generator is designed and verified by simulation and experimental results. The resulting output waveforms meet the process requirements, and the obtained results demonstrate that the proposed current source-type pulse generator circuit can be suitably used for capacitively coupled plasma loads.

中文翻译：

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用于高压电容耦合等离子体系统的具有改进波形保真度的脉冲电流发生器

本文提出了一种电流源型脉冲发生器电路，通过解决电容耦合等离子体系统的电压振铃问题来改善负载电压波形。等离子工业中使用的电压源型脉冲电源在电容耦合等离子负载下存在短路电流和电压振铃问题。本文提出的电流源型脉冲发生器可以解决这些问题。建议的电路由四个详细电路组成：偏置电流发生器、偏置电流调制器、斜率电流发生器和斜率电流调制器。它们在直流环节形成两个恒定电流，并向负载输出两个脉冲电流。这些输出电流有助于产生电容耦合等离子体工艺所需的等离子体负载电压。所提出的电路已通过 PLECS 模拟器和实验室规模的硬件系统进行验证。为了检验输出波形的改善情况，在相同的实验条件下测试了电压源型脉冲发生器和电流源型脉冲发生器。结果由负载电压和电流波形表示。此外，对电流源型脉冲发生器的整个系统进行了设计，并通过仿真和实验结果进行了验证。所得输出波形满足工艺要求，所得结果表明所提出的电流源型脉冲发生器电路可适用于电容耦合等离子体负载。电压源型脉冲发生器和电流源型脉冲发生器在相同的实验条件下进行测试。结果由负载电压和电流波形表示。此外，对电流源型脉冲发生器的整个系统进行了设计，并通过仿真和实验结果进行了验证。所得输出波形满足工艺要求，所得结果表明所提出的电流源型脉冲发生器电路可适用于电容耦合等离子体负载。电压源型脉冲发生器和电流源型脉冲发生器在相同的实验条件下进行测试。结果由负载电压和电流波形表示。此外，对电流源型脉冲发生器的整个系统进行了设计，并通过仿真和实验结果进行了验证。所得输出波形满足工艺要求，所得结果表明所提出的电流源型脉冲发生器电路可适用于电容耦合等离子体负载。