The ridge waveguide on the TGG crystal has been fabricated through the combination of the ion implantation and the femtosecond laser ablation. Firstly, optical planar waveguide was formed on the top surface of TGG crystal by ion implantation. To investigate the damage induced by the 6.0 MeV Si ion implantation at a dose of 2.0 × 1015 ions/cm2, the vacancy distribution was obtained by the SRIM simulation programme. Subsequently, the ridge waveguide with a width of 20 µm was produced by femtosecond laser ablation. The optical guiding properties of the ridge TGG waveguide were measured at the near-infrared wavelength (976 nm) by the end-face coupling technique. The work demonstrated that the manufactured waveguide structure possesses the ability to confine the light into guided mode, making it potentially valuable in integrated devices.

中文翻译：

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飞秒激光烧蚀在离子注入TGG晶体上制备脊形波导

TGG晶体上的脊形波导是通过离子注入和飞秒激光烧蚀相结合的方法制成的。首先，通过离子注入在TGG晶体的顶面形成光学平面波导。为了研究剂量为 2.0 × 1015 离子/cm2 的 6.0 MeV Si 离子注入引起的损伤，通过 SRIM 模拟程序获得了空位分布。随后，通过飞秒激光烧蚀制作了宽度为 20 µm 的脊形波导。通过端面耦合技术在近红外波长 (976 nm) 下测量脊形 TGG 波导的光导特性。该工作表明，制造的波导结构具有将光限制在导模中的能力，使其在集成设备中具有潜在价值。