Abstract The main goal of the surface machining of gallium nitride (GaN) is to obtain higher removal rate and good surface quality. Thus, we attempted to investigate the impact of the one-dimension sinusoidal assistant vibration on the nano-grinding of GaN by molecular dynamics simulations. By the comparison between the vibration-assisted nano-grinding and the conventional nano-grinding, it is found that the grinding force of the vibration-assisted nano-grinding fluctuated periodically, and the flow field of the vibration-assisted nano-grinding around the diamond abrasive was changed by the assisting vibration. Furthermore, the GaN fluidity of the vibration with period of 20 ps was better than the other condition and had a thinner sub-surface damaged layer than the conventional nano-grinding. Although the final surface quality of the vibration-assisted nano-grinding was worse than the conventional nano-grinding, it was proven that the vibration-assisted nano-grinding achieved higher removal rate and acceptable quality simultaneously by the vibration-assisted nano-grinding.

中文翻译：

---

基于分子动力学的氮化镓振动辅助纳米研磨研究

摘要 氮化镓（GaN）表面加工的主要目标是获得更高的去除率和良好的表面质量。因此，我们试图通过分子动力学模拟研究一维正弦辅助振动对 GaN 纳米研磨的影响。通过振动辅助纳米研磨与常规纳米研磨的对比发现，振动辅助纳米研磨的磨削力呈周期性波动，振动辅助纳米研磨的流场在通过辅助振动改变金刚石磨料。此外，周期为 20 ps 的振动的 GaN 流动性优于其他条件，并且比常规纳米研磨具有更薄的亚表面损伤层。