Abstract Despite the high prevalence of tin oxide (SnO2) based sensors for detection of numerous toxic gases, they suffer from issues of cross-sensitivity and high operating temperatures. Herein, SnO2 lattice has been modified with highly catalytic erbium (Er) based rare earth metal to address aforementioned issues. Thin films of undoped and 1, 3, 5 wt% Er-doped SnO2 nanoparticles have been deposited by electron beam evaporation technique and influence of Er on structural and optical characteristics of SnO2 films has been investigated for gas sensing applications. The incorporation of Er in SnO2 thin films has been found to tune the concentration of oxygen vacancies, which can enhance the gas sensing parameters. The sensor with an optimized amount of Er (3 wt%) exhibits a maximum sensing response for 1 ppb of NO2 at room temperature (25°C) with improved selectivity and stability against humidity.

中文翻译：

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通过 Er 掺杂修饰 SnO2 表面氧空位用于超低 NO2 检测

摘要 尽管用于检测多种有毒气体的基于氧化锡 (SnO2) 的传感器非常流行，但它们仍存在交叉敏感性和高工作温度的问题。在此，SnO2 晶格已用高催化性的铒 (Er) 基稀土金属进行改性，以解决上述问题。已通过电子束蒸发技术沉积了未掺杂和 1、3、5 wt% Er 掺杂的 SnO2 纳米粒子的薄膜，并且已经研究了 Er 对 SnO2 薄膜结构和光学特性的影响，用于气体传感应用。已经发现在 SnO2 薄膜中掺入 Er 可以调节氧空位的浓度，这可以增强气敏参数。