Abstract—

Based on the numerical simulations in ANSYS software the design of a monomorph (unimorph) deformable mirror has been developed. The control electrodes pattern, which allows reproducing aberrations up to 5th order (the first 21 Zernike modes) on the light aperture with high fidelity, was chosen. All important characteristics of the monomorph mirror were simulated: electrode-influence functions, errors in the reproduction of given aberrations, gravitational sag of the mirror, mirror surface deformations due to ambient temperature changes, thermal deformations and thermal field due to the incident laser beam, and natural frequencies of the mirror. The results prove a high efficiency of this mirror as an element of adaptive optics systems.

中文翻译：

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ANSYS软件中单晶变形镜的数值模拟

摘要—

基于ANSYS软件中的数值模拟，开发了单晶（单晶）可变形镜的设计。选择了控制电极图案，该图案允许以高保真度在光孔径上再现高达5阶的像差（前21个Zernike模式）。模拟了单晶片反射镜的所有重要特征：电极影响函数，给定像差再现中的误差，反射镜的重力垂度，环境温度变化导致的反射镜表面变形，入射激光束引起的热变形和热场，和镜子的固有频率。结果证明该反射镜作为自适应光学系统的一个元件具有很高的效率。