Piezoceramic-based ultrasonic transducers are widely used in the fabrication and packaging of the microelectronic device and their performance largely depends on the ultrasonic energy delivery efficiency (UEDE) which can be reflected by the tip vibration amplitude output (TVAO) of the transducer indirectly. Recently, it was reported that a new type of flexure hinge-based mounting clamp could enhance the TVAO of the transducer significantly. To get the best effect, this research aimed at developing an optimization method for this newly proposed mounting clamp. For the purpose, a series of researches were performed against a self-developed transducer equipped with a pair of circular notched hinge-based mounting clamps. Firstly, the influential rules of several key geometric parameters of the flexure hinge on the TVAO of the ultrasonic transducer were explored. Then, an optimization objective function together with a group of constraints was constructed. Next, the Particle Swarm Optimization (PSO) algorithm was used to optimize the geometric parameters of the circular hinge-based mounting clamp. Finally, the performance of the optimized mounting clamp was tested based on a measurement and evaluation system. The results show the optimized mounting clamp can enhance the TVAO of the transducer greatly, presenting a good improvement effect of the UEDE, and manifesting the feasibility and effectiveness of the developed method.

基于压电陶瓷的超声换能器被广泛用于微电子设备的制造和包装中，其性能很大程度上取决于超声能量传递效率（UEDE），该效率可通过换能器的尖端振动幅度输出（TVAO）间接反映出来。最近，据报道，一种新型的基于挠性铰链的安装夹具可以显着提高换能器的TVAO。为了获得最佳效果，本研究旨在针对这种新提出的安装夹具开发一种优化方法。为此目的，针对配备有一对圆形缺口铰链安装夹具的自行研发的换能器进行了一系列研究。首先，探讨了挠性铰链几个关键几何参数对超声换能器TVAO的影响规律。然后，构建了优化目标函数和一组约束。接下来，使用粒子群优化（PSO）算法来优化基于圆形铰链的安装夹具的几何参数。最后，基于测量和评估系统对优化的安装夹的性能进行了测试。结果表明，优化的安装夹具可以大大提高换能器的TVAO，表现出UEDE的良好改善效果，表明了该方法的可行性和有效性。使用粒子群优化（PSO）算法来优化基于圆形铰链的安装夹具的几何参数。最后，基于测量和评估系统对优化的安装夹的性能进行了测试。结果表明，优化的安装夹具可以大大提高换能器的TVAO，表现出UEDE的良好改善效果，表明了该方法的可行性和有效性。使用粒子群优化（PSO）算法来优化基于圆形铰链的安装夹具的几何参数。最后，基于测量和评估系统对优化的安装夹的性能进行了测试。结果表明，优化的安装夹具可以大大提高换能器的TVAO，表现出UEDE的良好改善效果，表明了该方法的可行性和有效性。