Micro/nano-electroforming has received considerable interest from various industry sectors as an advanced micro-manufacturing technique that offers high dimensional precision and replication accuracy. When tight feature tolerances and miniaturized geometries are required, electroforming provides unique advantages and cost-effective characteristics for fabrication. This paper firstly reviews the historical development of micro-electroforming, particularly within the past two decades. The fundamentals of electroforming and relevant applications are firstly discussed, and the common requirements are then proposed. Based on these requirements, we have focused on the processes of micro-electroforming from the ultraviolet lithography, electroplating, and moulding process to electroforming process characterization and optimization, bath compositions, agitation, and some hybrid processes. Progress from electrochemical micro/nano-manufacturing processes, such as 3D printing by electrodep...

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精密微/纳米电铸的进展：最新进展

作为一种提供高尺寸精度和复制精度的先进微制造技术，微/纳米电铸已受到各个行业的广泛关注。当需要严格的特征公差和最小化的几何形状时，电铸可为制造提供独特的优势和经济高效的特性。本文首先回顾了微电铸的历史发展，特别是在过去的二十年中。首先讨论了电铸的基本原理和相关应用，然后提出了共同的要求。根据这些要求，我们专注于微电铸工艺，从紫外线光刻，电镀，成型工艺到电铸工艺特性和优化，镀液成分，搅拌和一些混合过程。电化学微/纳米制造工艺的进展，例如通过电沉积的3D打印...