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Structural and Electrochemical Characterization of Radio Frequency Magnetron‐Sputtered LiCoO2 Thin Films
Physica Status Solidi (A) - Applications and Materials Science Pub Date : 2020-08-19 , DOI: 10.1002/pssa.202000382 Fabian Michel 1 , Marcel Couturier 1 , Martin Becker 1 , Angelika Polity 1
Physica Status Solidi (A) - Applications and Materials Science Pub Date : 2020-08-19 , DOI: 10.1002/pssa.202000382 Fabian Michel 1 , Marcel Couturier 1 , Martin Becker 1 , Angelika Polity 1
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LiCoO2 thin films are grown by radio frequency magnetron sputter‐deposition on platinum‐coated Al2O3 (c‐sapphire) substrates. Deposition parameters such as substrate temperature and the partial pressure ratio between O2 and Ar are varied to find suitable parameters for a cathode offering reversible intercalation and deintercalation of lithium ions. Structural characterization is carried out using X‐ray diffraction and Raman spectroscopy, revealing that the orientation as well as the crystallinity of the deposited LiCoO2 films can be influenced by varying the O2/Ar ratio and simultaneously applying a sufficient substrate temperature during deposition. Furthermore, both the atomic composition and the atomic distribution are determined using X‐ray photoelectron spectroscopy and secondary ion mass spectrometry. Results show that the films posses surface contaminations of Li and oxygen‐rich compounds but have a homogeneous atomic distribution throughout the depth profile. For electrochemical characterization, LiCoO2 thin films where charged and discharged against lithium metal while using a liquid electrolyte consisting of LiPF6 dissolved in a mixture of ethylen carbonate/dimethyl carbonate with a molar fraction of 1:1. Reversible discharge capacities in the order of up to 70 mAh g−1 or 32.40 μAh cm−2 μm−1 can be achieved for optimized LiCoO2 thin films.
中文翻译：
射频磁控溅射LiCoO2薄膜的结构和电化学表征
LiCoO 2薄膜是通过射频磁控溅射在镀铂的Al 2 O 3（c-蓝宝石）衬底上生长的。改变诸如衬底温度和O 2与Ar之间的分压比之类的沉积参数，以找到用于阴极的合适参数，该阴极提供锂离子的可逆嵌入和脱嵌。使用X射线衍射和拉曼光谱进行结构表征，发现所沉积的LiCoO 2膜的取向和结晶度可通过改变O 2来影响/ Ar比，同时在沉积过程中施加足够的基板温度。此外，使用X射线光电子能谱和二次离子质谱法确定原子组成和原子分布。结果表明，该膜具有锂和富氧化合物的表面污染，但在整个深度剖面中原子分布均匀。为了进行电化学表征，使用由LiPF 6组成的液体电解质将LiCoO 2薄膜相对于锂金属充电和放电，其中LiPF 6溶解在摩尔分数为1：1的碳酸亚乙酯/碳酸二甲酯的混合物中。可逆放电容量最高可达70 mAh g -1或32.40μAhcm -2对于优化的LiCoO 2薄膜可以达到 μm -1。
更新日期：2020-10-22
中文翻译：
射频磁控溅射LiCoO2薄膜的结构和电化学表征
LiCoO 2薄膜是通过射频磁控溅射在镀铂的Al 2 O 3（c-蓝宝石）衬底上生长的。改变诸如衬底温度和O 2与Ar之间的分压比之类的沉积参数，以找到用于阴极的合适参数，该阴极提供锂离子的可逆嵌入和脱嵌。使用X射线衍射和拉曼光谱进行结构表征，发现所沉积的LiCoO 2膜的取向和结晶度可通过改变O 2来影响/ Ar比，同时在沉积过程中施加足够的基板温度。此外，使用X射线光电子能谱和二次离子质谱法确定原子组成和原子分布。结果表明，该膜具有锂和富氧化合物的表面污染，但在整个深度剖面中原子分布均匀。为了进行电化学表征，使用由LiPF 6组成的液体电解质将LiCoO 2薄膜相对于锂金属充电和放电，其中LiPF 6溶解在摩尔分数为1：1的碳酸亚乙酯/碳酸二甲酯的混合物中。可逆放电容量最高可达70 mAh g -1或32.40μAhcm -2对于优化的LiCoO 2薄膜可以达到 μm -1。
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