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Self-assembly of block copolymers under non-isothermal annealing conditions as revealed by grazing-incidence small-angle X-ray scattering.
Journal of Synchrotron Radiation ( IF 2.4 ) Pub Date : 2020-08-19 , DOI: 10.1107/s1600577520009820
Marta Fernández-Regúlez 1 , Eduardo Solano 2 , Laura Evangelio 1 , Steven Gottlieb 1 , Christian Pinto-Gómez 1 , Gemma Rius 1 , Jordi Fraxedas 3 , Edgar Gutiérrez-Fernández 4 , Aurora Nogales 4 , Mari Cruz García-Gutiérrez 4 , Tiberio A Ezquerra 4 , Francesc Pérez-Murano 1
Affiliation  

An accurate knowledge of the parameters governing the kinetics of block copolymer self‐assembly is crucial to model the time‐ and temperature‐dependent evolution of pattern formation during annealing as well as to predict the most efficient conditions for the formation of defect‐free patterns. Here, the self‐assembly kinetics of a lamellar PS‐b‐PMMA block copolymer under both isothermal and non‐isothermal annealing conditions are investigated by combining grazing‐incidence small‐angle X‐ray scattering (GISAXS) experiments with a novel modelling methodology that accounts for the annealing history of the block copolymer film before it reaches the isothermal regime. Such a model allows conventional studies in isothermal annealing conditions to be extended to the more realistic case of non‐isothermal annealing and prediction of the accuracy in the determination of the relevant parameters, namely the correlation length and the growth exponent, which define the kinetics of the self‐assembly.

中文翻译:

嵌段共聚物在非等温退火条件下的自组装,如掠入射小角X射线散射所揭示。

准确掌握控制嵌段共聚物自组装动力学的参数,对于建模退火过程中随时间和温度而变化的图案形成以及预测形成无缺陷图案的最有效条件至关重要。在这里,层状PS‐ b的自组装动力学通过将掠入射小角X射线散射(GISAXS)实验与一种新颖的建模方法相结合,研究了等温和非等温退火条件下的‐PMMA嵌段共聚物,该方法可以说明嵌段共聚物薄膜到达前的退火历史等温状态。这样的模型可以将等温退火条件下的常规研究扩展到非等温退火的更实际情况,并预测确定相关动力学的相关参数(即相关长度和生长指数)的准确性。自组装。
更新日期:2020-08-19
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