In the present work, effect of incident laser parameters (wavelength, power and modulating frequency) on the photothermal deflection response of Au/Si bimaterial microcantilevers (MCs) is investigated. Wavelength dependent studies were performed by exposing the free end of Au coated Si MCs to five different laser diode sources (406 nm (UV) – 984 nm (near IR)), at constant laser power of 2 mW. Dynamic response and incident laser power dependence studies were performed by varying the modulating frequency (DC to 2 kHz) and power of the actuating laser, respectively. MC deflection response was found to reduce with increasing wavelength and is explained on the basis of wavelength dependent absorptivity of the exposed MC surface and the corresponding temperature rise at the free end of MC. Experimental results were compared with various theoretical models and were found to be in good agreement when heat dissipation to the environment, through convection losses, was included. Similarly, at a given wavelength, MC deflection magnitude was found to roll off for laser modulating frequencies > 100 Hz. These observations are explained on the basis of reduction in absorbed power per unit time at high frequencies, which in turn reduces the temperature rise. Temperature rise at the free end of MC was independently estimated from micro-Raman measurements and corroborated with MC deflection measurements.

在本工作中，研究了入射激光参数（波长，功率和调制频率）对Au / Si双材料微悬臂梁（MCs）的光热偏转响应的影响。通过在2 mW的恒定激光功率下，将Au涂覆的Si MC的自由端暴露于五个不同的激光二极管源（406 nm（UV）– 984 nm（近IR）），进行波长依赖的研究。通过分别改变调制频率（DC至2 kHz）和激励激光的功率来进行动态响应和入射激光功率相关性研究。发现MC偏转响应随波长的增加而减小，并基于暴露的MC表面的波长相关吸收率和MC自由端相应的温度升高进行解释。将实验结果与各种理论模型进行了比较，发现当包括通过对流损耗而散发到环境中的热量时，结果是一致的。同样，在给定的波长下，发现MC偏转幅度在大于100 Hz的激光调制频率时会降低。这些观察结果的解释是基于在高频下每单位时间吸收功率的减少，从而减少了温度升高。MC自由端的温度升高是通过微拉曼测量独立估算的，并通过MC挠度测量得到证实。100赫兹 这些观察结果的解释是基于在高频下每单位时间吸收功率的减少，从而减少了温度升高。MC自由端的温度升高是通过微拉曼测量独立估算的，并通过MC挠度测量得到证实。100赫兹 这些观察结果的解释是基于在高频下每单位时间吸收功率的减少，从而减少了温度升高。MC自由端的温度升高是通过微拉曼测量独立估算的，并通过MC挠度测量得到证实。