The particle-in-cell simulation is applied to study a nanometer-sized dielectric particle lofting from a dielectric substrate exposed to a low energy electron beam. The article discusses the electron accumulation between such a substrate and a particle lying on it, that can cause a particle lofting. The results are of interest for dust mitigation in the semiconductor industry, the lunar exploration and the explanation of the dust levitation.

中文翻译：

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从暴露于低能电子束的介电基板上释放的介电粒子

细胞内粒子模拟用于研究从暴露于低能电子束的介电基板上放出的纳米级介电粒子。这篇文章讨论了这种基板和位于其上的粒子之间的电子积累，这可能导致粒子放样。研究结果对半导体行业的减尘、月球探测和尘埃悬浮的解释具有重要意义。