The patterning of polydimethylsiloxane (PDMS) into complex two-dimensional (2D) or 3D shapes is a crucial step for diverse applications based on soft lithography. Nevertheless, mould replication that incorporates time-consuming and costly photolithography processes still remains the dominant technology in the field. Here we developed monolithic quasi-3D digital patterning of PDMS using laser pyrolysis. In contrast with conventional burning or laser ablation of transparent PDMS, which yields poor surface properties, our successive laser pyrolysis technique converts PDMS into easily removable silicon carbide via consecutive photothermal pyrolysis guided by a continuous-wave laser. We obtained high-quality 2D or 3D PDMS structures with complex patterning starting from a PDMS monolith in a remarkably low prototyping time (less than one hour). Moreover, we developed distinct microfluidic devices with elaborated channel architectures and a customizable organ-on-a-chip device using this approach, which showcases the potential of the successive laser pyrolysis technique for the fabrication of devices for several technological applications.

将聚二甲基硅氧烷（PDMS）图案化为复杂的二维（2D）或3D形状是基于软光刻的各种应用的关键步骤。然而，结合了耗时且昂贵的光刻工艺的模具复制仍然是该领域的主要技术。在这里，我们使用激光热解技术开发了PDMS的单片准3D数字图案。与传统的透明PDMS燃烧或激光烧蚀会产生较差的表面性能相比，我们的连续激光热解技术通过在连续波激光器的引导下进行连续的光热解将PDMS转换为易于去除的碳化硅。我们从PDMS整料以极短的原型制作时间（不到一小时）获得了具有复杂图案的高质量2D或3D PDMS结构。此外，