The prototype piezoelectric material BaTiO₃ is widely used in e.g., capacitators. Chemical solution deposition (CSD) of BaTiO₃ films is a simple and environmentally friendly processing route, but insight in the crystallization process is crucial to tailor the film properties. In this work, the influence of the annealing conditions on the crystallization behavior of BaTiO₃ thin films from aqueous chemical solution deposition is presented. In situ synchrotron X-ray diffraction was used to reveal the phase evolution, crystallization of the films, and to study how the degree of crystallographic texture in the polycrystalline films evolved. Our results revealed that the formation of an intermediate metastable oxycarbonate phase is critical for the formation of BaTiO₃ thin films prepared by aqueous CSD. The pyrolysis products present in the film before crystallization determine the degree of preferential orientation and by tuning the heating program, especially the heating rate through nucleation (<0.2 °C/s), control of the microstructure and degree of preferential orientation in the films was demonstrated.

原型压电材料BaTiO ₃广泛用于例如电容器。BaTiO ₃膜的化学溶液沉积（CSD）是一种简单且环保的工艺路线，但是结晶过程中的洞察力对于调整膜的性能至关重要。在这项工作中，退火条件对BaTiO ₃薄膜从水溶液中结晶行为的影响介绍了化学溶液沉积。原位同步加速器X射线衍射用于揭示薄膜的相演化，结晶，并研究多晶薄膜的晶体织构度如何演化。我们的结果表明，中间亚稳的碳酸盐中间相的形成对于通过水性CSD制备的BaTiO ₃薄膜的形成至关重要。结晶前薄膜中存在的热解产物决定了优先取向的程度，并通过调节加热程序，特别是通过成核的加热速率（<0.2°C / s），控制了薄膜的微观结构和优先取向的程度。演示。