Abstract Ar1000 cluster ion beam was used to fabricate irregular structures of a micrometer scale on the surface of pressed Si powder of 60 nm nanoparticles (NPs). The average density of the target material played an important role in the surface features formation. The samples with lower average density, i.e. with larger distance between adjacent NPs demonstrated more developed surface morphology, which implied an importance of the degree of freedom of NP and its beam induced mobility in formation of the surface features. At higher average density a process of particle erosion was accompanied by the debris formation, which filled the gaps between the NPs, blocked the particle mobility, and, eventually, resulted in conventional smoothing effect.

中文翻译：

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气体团簇离子束在纳米结构表面形成不规则形貌

摘要 使用Ar1000团簇离子束在60 nm纳米颗粒（NPs）压制的硅粉表面制备微米级的不规则结构。目标材料的平均密度在表面特征的形成中起重要作用。平均密度较低的样品，即相邻纳米颗粒之间距离较大的样品表现出更发达的表面形态，这意味着纳米颗粒的自由度及其光束诱导的迁移率在表面特征形成中的重要性。在较高的平均密度下，颗粒侵蚀过程伴随着碎片形成，碎片填充了纳米颗粒之间的间隙，阻止了颗粒的移动，并最终产生了传统的平滑效果。