The desorption behavior of propylene glycol monomethyl ether acetate (PGMEA), which is a volatile organic compound (VOC) used in semiconductor manufacturing, from activated carbon (AC) was experimentally and theoretically studied over a wide range of supercritical carbon dioxide (scCO₂) conditions at T=(313 K to 353 K) and P=(10.0 MPa to 20.0 MPa) for the design of AC regeneration processes using scCO₂. The experimental results reveal that the desorption ratio of PGMEA depended on the density of CO₂, and is affected by its chemical structure and diffusivity of the VOC. A kinetic model based on the material balances of the VOC in the bulk phase and adsorption equilibria in the adsorbed phase described by the Dubinin–Astakhov equation was newly proposed to predict the desorption behavior. The model successfully predicted the desorption behavior using parameters determined from adsorption equilibrium and kinetic measurements of PGMEA on AC in scCO₂.

在宽范围的超临界二氧化碳（scCO ₂）上，通过实验和理论研究了丙二醇单甲醚乙酸酯（PGMEA）从活性炭（AC）的解吸行为，PGMEA是半导体制造中使用的挥发性有机化合物（VOC ）。设计使用scCO ₂的AC再生工艺时，在T =（313 K至353 K）和P =（10.0 MPa至20.0 MPa）的条件下。实验结果表明，PGMEA的解吸率取决于CO ₂的密度。，并受其VOC的化学结构和扩散性影响。提出了一种新的动力学模型，该模型基于Dubinin–Astakhov方程描述的本体相中VOC的物质平衡和吸附相中的吸附平衡，以预测解吸行为。该模型成功地使用了PGMEA在scCO _2中对AC的吸附平衡和动力学测量所确定的参数，成功地预测了脱附行为。