To enhance the precision manufacturing of microstructures, a 3-D isotropic microprobe based on three-flexible-hinge suspension and orthogonal microball collimation was developed. First, the sensing principle of the microprobe was investigated by analyzing its displacement transfer principle and the displacement measurement principle of the orthogonal microball collimation optical paths. Second, the stiffness model of the microprobe at the tip was established by considering the influence of the measuring stylus stiffness. Subsequently, the isotropic design of the microprobe was developed in terms of the 3-D isotropic stiffness and sensitivity. Utilizing the rotation and translation of the three-flexible-hinge suspension, the 3-D tip displacements were transformed into the 3-D displacements of the microball of the transfer stylus which was fixed in the reverse coaxial direction to the measuring stylus, then the 3-D displacements of the microball were transformed into centroid position shifts of the light spots by the orthogonal microball collimation optical paths. Finally, a 3-D isotropic microprobe was fabricated, and experiments to verify its performance for measurements pertaining to microholes and microsteps were conducted. A method for the effective measurement of microholes was established, which could improve the measurement efficiency, and the tilt angle of the countertop was considered for the measurement of the microsteps. The experimental results indicated that the proposed microprobe could help realize low measurement force, 3-D isotropic measurement of microstructures, and improvement of the measurement accuracy.

中文翻译：

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基于三挠性铰链悬架的三维各向同性微探针设计

为了提高微结构的精密制造，开发了基于三挠性铰链悬挂和正交微球准直的3-D各向同性微探针。首先，通过分析其位移传递原理和正交微球准直光路的位移测量原理，研究了微探针的传感原理。其次，考虑测针刚度的影响，建立了尖端微探针的刚度模型。随后，根据3-D各向同性的刚度和灵敏度开发了微探针的各向同性设计。利用三柔性铰链悬架的旋转和平移，将3-D针尖位移转换为传输笔的微型球的3-D位移，该笔沿反同轴方向固定在测量笔上，然后将微型球的3-D位移转换为测头的质心位置偏移正交微球准直光路产生的光斑。最后，制造了一个3D各向同性的微探针，并进行了实验以验证其在与微孔和微步有关的测量中的性能。建立了有效测量微孔的方法，可以提高测量效率，并考虑了工作台面的倾斜角度来进行微台阶的测量。实验结果表明，提出的微探针可以帮助实现低测量力，