Currently, studies about the CO₂ gas injection improve the production efficiency of crude oil. The surface interaction between CO₂ and thin films is a large area of research in the scientific community. In this work, we are showing that The TiZrN (coating) + Si (substrate) system immersed on environments of fully CO₂ can interact to below 400°C temperature, because the TiZrN (coating) + Si (substrate) system is broken to temperatures above of the 400°C. The Ti2p, Zr3d, N1s, O1s, and C1s narrow spectra are shown, which illustrate the evolution of TiZrN to TiN_x, TiO_x, and TiON_x compounds and afterwards to TiO₂ and ZrO₂ phases. TiN_x, TiO_x, and TiON_x compounds are responsible for the increase of the micro‐hardness (measured through Vickers Hardness Testing) of the system (TiZrN [coating] + Si [substrate]) due to that are found at 400°C thermal treatment. Topographical images obtained by atomic force microscopy showed an increase of the surface roughness due to the thermal treatment. Scanning electron microscopy demonstrated that sample submit to 600°C temperature suffered fracture with small indentations.

中文翻译：

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在CO2控制的气氛中对（TiZr）N涂层进行热处理

当前，关于CO ₂气体注入的研究提高了原油的生产效率。CO ₂和薄膜之间的表面相互作用是科学界的一大研究领域。在这项工作中，我们表明，浸入完全CO _2的环境中的TiZrN（涂层）+ Si（基底）系统可以在低于400°C的温度下相互作用，因为TiZrN（涂层）+ Si（基底）系统被破坏了。温度高于400°C。显示了Ti2p，Zr3d，N1s，O1s和C1s的窄光谱，这些光谱说明了TiZrN向TiN _x，TiO _x和TiON _x化合物的演化以及之后向TiO ₂和ZrO ₂相的演化。锡_x，TiO _x和TiON _x化合物导致系统（TiZrN [涂层] + Si [基材]）的显微硬度（通过维氏硬度测试测量）的增加，这是由于在400°C的温度下发现的治疗。通过原子力显微镜获得的形貌图像显示由于热处理而导致的表面粗糙度增加。扫描电子显微镜表明，样品在600°C的温度下遭受了断裂，并带有较小的压痕。