In this study, a method which would improve reliability of coated vertical type micro-probe under Joule heating is described. The method is to decouple the mechanical and electrical characteristics of a probe. That is, the method is to coat a metal with good electrical characteristics on a core metal with a good mechanical characteristics by electroplating. For various configurations of cross-sectional area of probe, FE analysis are performed, and a fabricated vertical micro-probe is tested to improve the accuracy of FE analysis. By increasing the coating thickness of a metal (gold, Au) with good electrical characteristics by electroplating while keeping a total cross-sectional area of a probe constant, the maximum temperature of probe continues to decrease as the cross-sectional area of core metal (nickel, Ni) with the good mechanical characteristics is reduced. A simple formula to predict the maximum temperature of probe depending on the coating thickness based on the results of FE analysis is proposed. The formula describe that the maximum temperature of the probe by Joule heating is a function of the ratio of the conductivity of the coating metal to the core metal and the ratio of the cross-sectional area of the coating metal to the total cross-sectional area of the probe.

在这项研究中，描述了一种在焦耳加热下可提高涂层垂直型微探针可靠性的方法。该方法是去耦探针的机械和电气特性。即，该方法是通过电镀在具有良好机械特性的芯金属上涂覆具有良好电特性的金属。对于探针截面积的各种配置，执行有限元分析，并测试制成的垂直微探针以提高有限元分析的准确性。通过在保持探头的总截面积恒定的同时通过电镀增加具有良好电学特性的金属（金，金）的涂层厚度，探头的最高温度会随着芯金属（镍，Ni）具有良好的机械特性。提出了一种基于有限元分析结果根据涂层厚度预测探针最高温度的简单公式。该公式描述了通过焦耳加热产生的探针的最高温度是涂层金属与芯金属的电导率之比和涂层金属横截面积与总横截面之比的函数探针