Confocal Raman microscopes are widely used in various applications because they provide physical and chemical information at a submicron scale. A high lateral resolution in the confocal Raman microscope is essential for obtaining high-quality images. We used an array of tungsten dots at a 600 nm pitch on a Si substrate of the certified reference material (NMIJ CRM 5207-a) to reliably evaluate the lateral resolution of a confocal Raman microscope at various pinhole sizes. The precision of the mapping scale in the x- and y-pitches was confirmed from Si signal profiles, and the lateral resolution was evaluated by a straight-edge method using scale indicators in the reference material. Because these procedures are applicable to other confocal Raman microscopes with popular specifications (532 nm laser, 100× objective lens, numerical aperture 0.9, step size 0.1 μm), they are suitable for both a reliable evaluation of the lateral resolution of a confocal Raman microscope and for daily checks on the precision of its mapping scale.

共焦拉曼显微镜广泛用于各种应用，因为它们提供亚微米尺度的物理和化学信息。共焦拉曼显微镜的高横向分辨率对于获得高质量图像至关重要。我们在经过认证的参考材料 (NMIJ CRM 5207-a) 的硅基板上使用了间距为 600 nm 的钨点阵列，以可靠地评估共焦拉曼显微镜在各种针孔尺寸下的横向分辨率。x和y节距的映射比例精度通过 Si 信号轮廓得到确认，并使用参考材料中的比例指示器通过直尺方法评估横向分辨率。由于这些程序适用于具有流行规格（532 nm 激光、100× 物镜、数值孔径 0.9、步长 0.1 μm）的其他共焦拉曼显微镜，因此它们适用于可靠评估共焦拉曼显微镜的横向分辨率并对其测绘比例尺的精度进行日常检查。