Magnetomyography (MMG) with superconducting quantum interference devices (SQUIDs) enabled the measurement of very weak magnetic fields (femto to pico Tesla) generated from the human skeletal muscles during contraction. However, SQUIDs are bulky, costly, and require working in a temperature-controlled environment, limiting wide-spread clinical use. We introduce a low-profile magnetoelectric (ME) sensor with analog frontend circuitry that has sensitivity to measure pico-Tesla MMG signals at room temperature. It comprises magnetostrictive and piezoelectric materials, FeCoSiB/AlN. Accurate device modelling and simulation are presented to predict device fabrication process comprehensively using the finite element method (FEM) in COMSOL Multiphysics . The fabricated ME chip with its readout circuit was characterized under a dynamic geomagnetic field cancellation technique. The ME sensor experiment validate a very linear response with high sensitivities of up to 378 V/T driven at a resonance frequency of f _res = 7.76 kHz. Measurements show the sensor limit of detections of down to 175 pT/√Hz at resonance, which is in the range of MMG signals. Such a small-scale sensor has the potential to monitor chronic movement disorders and improve the end-user acceptance of human–machine interfaces.

中文翻译：

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用于微微特斯拉 MagnetoMyoGraphy 的超灵敏磁电传感系统。

使用超导量子干涉装置 (SQUID) 的磁切术 (MMG) 能够测量收缩期间人体骨骼肌产生的非常微弱的磁场（飞到皮特斯拉）。然而，SQUID 体积大、成本高，并且需要在温度受控的环境中工作，限制了广泛的临床使用。我们推出了一种带有模拟前端电路的薄型磁电 (ME) 传感器，该传感器具有在室温下测量微微特斯拉 MMG 信号的灵敏度。它包括磁致伸缩和压电材料，FeCoSiB/AlN。提出了准确的器件建模和仿真，以使用有限元方法 (FEM) 综合预测器件制造过程COMSOL 多物理场 . 带有读出电路的制造的 ME 芯片在动态地磁场消除技术下进行了表征。ME 传感器实验验证了非常线性的响应，在谐振频率为 378 V/T 时具有高灵敏度F _分辨率= 7.76 kHz。测量结果显示，谐振时传感器的检测极限低至 175 pT/√Hz，这在 MMG 信号的范围内。这种小型传感器有可能监测慢性运动障碍并提高最终用户对人机界面的接受度。